Raws li cov txheej txheem semiconductor thoob ntiaj teb txav mus rau qib siab ntawm 3nm / 2nm, precision titanium cov ntaub ntawv (ASTM B265 / B348, Qib 1/2/5 siab-purity titanium thiab titanium alloys) tau kho dua los ntawm "cov ntaub ntawv pabcuam" mus rau cov ntaub ntawv tseem ceeb rau cov khoom siv semiconductor, xws li high-core manufacturing, ultra-tsis muaj impurities, muaj zog thermal stability, corrosion kuj, thiab tsis yog{10}} cov khoom sib nqus. Kev ua lag luam mloog thiab xav tau yog synchronously nce.
Core tsav tsheb: Cov txheej txheem Advanced yuam kev hloov khoom dua tshiab
Cov txheej txheem semiconductor Advanced (5nm thiab hauv qab) yuav tsum muaj peb yam tseem ceeb ntawm cov khoom siv: nanometer qib precision, atomic theem huv, thiab huab cua ruaj khov:
-High purity titanium lub hom phiaj cov khoom (Qib 1, purity Ntau dua los yog sib npaug rau 99.999% / 5N): PVD sputtering core cov ntaub ntawv, siv rau tooj liab interconnect barrier txheej, hu rau plug, tiv thaiv tooj liab atom diffusion los ntawm paug silicon wafers, ncaj qha 3 nti kev ua tau zoo txheej txheem.
-Precision structural Cheebtsam (Qib 2/5): lithography tshuab worktable, etching tshuab chamber, nqus flange, wafer neeg hlau caj npab, thiab lwm yam, nrog ib tug tsawg thermal expansion coefficient (8.6 × 10 ⁻⁶/degree ) thiab kub fluctuation deformation ntawm aluminium alloy theem 1/3 meter .
-Cov khoom tiv thaiv corrosion (Qib 7): Ua rau muaj zog acid / halogen corrosion nyob rau hauv ntub etching thiab ntxuav cov cuab yeej, tsis muaj hlau nag los nag, haum rau lub tshuab nqus tsev siab thiab muaj zog plasma huab cua ua haujlwm.
Core zoo ntawm American standard titanium cov ntaub ntawv
1. Ultra siab purity+ultra-tsis muaj impurities: American tus qauv Qib 1 siab-purity titanium nrog controllable oxygen/nitrogen/carbon impurities<50ppm, no heavy metal pollution such as iron and nickel, meets SEMI F42 standards, and is suitable for advanced process atomic level cleanliness requirements.
2. Thermal stability + Dimensional precision: tsawg thermal conductivity (21.9W / (m · K)), me me coefficient ntawm thermal expansion, kam rau siab mus txog ± 0.005mm, nto smoothness Ra tsawg dua los yog sib npaug rau 0.4 μ m, haum rau nanoscale sib dhos thiab lub tshuab nqus tsev sealing.
3. Corrosion resistance+non-magnetic + low gas tso: natural oxide layer self-kho, resistant to Cl ₂/F ₂/muaj zog acid corrosion; Tsis sib nqus thiab tsis cuam tshuam nrog precision circuits; Cov huab cua tso tawm qis heev nyob rau hauv ultra- lub tshuab nqus tsev siab (UHV), kom ntseeg tau qhov huv ntawm chav.
4. Lub teeb yuag thiab siab zog: ntom ntawm 4.51g / cm ³ (40% sib zog dua stainless hlau), Qib 5 tensile zog Ntau dua los yog sib npaug rau 930MPa, lub zog tshwj xeeb ob npaug ntawm cov hlau tsis muaj steel, haum rau lub teeb yuag ntawm qhov siab - ceev txav qhov chaw.
Cov xwm txheej tseem ceeb ntawm daim ntawv thov
-High purity titanium lub hom phiaj cov khoom (Qib 1): PVD sputtering deposition, siv rau logic/storage nti barrier txheej thiab nplaum txheej, nrog rau lub ntiaj teb no kev lag luam loj ntawm 1.87 billion US dollars nyob rau hauv 2024 thiab ib tug CAGR ntawm 9.3% los ntawm 2026 txog 2030.
-Nqus chamber/flange (Qib 2): Lub tshuab nqus tsev rau etching thiab deposition khoom, resistant rau siab siab, tsis tshua muaj roj tso tawm, thiab txhim khu kev qha sealing.
-Precision robotic arm/end effector (Qib 5): wafer hloov, lub teeb yuag thiab siab -lub zog, meej qhov chaw, thiab tsis muaj particle shedding.
-Cov khoom siv tiv thaiv corrosion (Qib 7): Cov txheej txheem ntub dej, tiv taus cov acids muaj zog xws li HF/HCl, txuas cov cuab yeej siv lub neej thiab txo cov nqi tu.
Kev lag luam sib txawv: kev hloov pauv hauv tsev + thev naus laus zis
Kev nthuav dav ntawm lub ntiaj teb semiconductor muaj peev xwm (tshwj xeeb tshaj yog nyob rau hauv Suav teb Mainland) tau tsav txoj kev loj hlob sai ntawm kev thov rau precision titanium cov ntaub ntawv. Xyoo 2023, kev lag luam loj ntawm Tuam Tshoj tus titanium precision qhov chaw rau semiconductors yuav tshaj 3 billion yuan, nrog rau kev loj hlob txhua xyoo ntawm ntau tshaj 25%. Cov khoom lag luam ruaj khov ntawm Asmeskas tus qauv Qib 1/2/5 precision titanium cov ntaub ntawv (xws li 0.05mm ultra-thin titanium ntawv ci, siab-cov ntaub ntawv purity, thiab precision structural Cheebtsam) tau ua tiav, nrog kev kam rau siab thiab purity mus txog thoob ntiaj teb qib siab, pab cov khoom lag luam ywj pheej tswj tau.
Raws li cov txheej txheem siab heev thiab kev hloov pauv hauv tsev ntawm ob lub log tsav, precision titanium cov ntaub ntawv uas ua tau raws li Asmeskas cov qauv tau dhau los ua cov kev txhawb nqa tseem ceeb rau kev kho dua tshiab ntawm kev lag luam semiconductor. Nyob rau hauv lub neej yav tom ntej, lawv yuav mus txuas ntxiv mus rau purity siab dua (6N), thinner specifications (Less tshaj los yog sib npaug rau 0.05mm), thiab ntau precision machining (± 0.002mm).
Thov ib daim Quote
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